Furnace structure & Vacuum Chamber

· Dual Heater, two temperature controllers, two-channel gas flowmeters are integrated into a mobile aluminum alloy frame

· The chamber is made of high purity fused quartz tube

· Quartz tube size: 11" OD/10.8" ID x 9" H

· The vacuum flanges are made of Stainless Steel 316

· Overall dimension: 850(L)×745(W)×1615(H) mm

Vacuum Flanges

  

· Top Flange with one KFD-25 vacuum port and two gas outlets (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily

· Bottom flange has one KFD-25 vacuum port with two gas inlets (1/4" pipe required) and needle valves

· Flange is sealed by double silicone o-rings and can achieve maximum vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump (vacuum pump is not included, please order separately)

· Precision anti-corrosion digital vacuum gauge is in standard package (Since 2016.03.24).

Gas Flow Meters

Two float-meters are installed on the control panel with measurement range of:

· 16 -160 mL/m 

· 400 - 4000 mL/m (for purging purpose) 

Heater and Sample Holder

· Two shortwave IR lamps as heating elements for fast heating.

· The distance between two heaters is adjustable from 10 - 50 mm

· The heaters are made of stainless steel with water cold jacket to reduce heat radiation and allow for fast cooling

· 3" round wafer holder is built in with top heater to load substrate

· One high thermal conductive AlN plate (3"Dia x 0.5mm Thick) is included, which shall put on the back of substrate to make it heated uniformly

· One 3" graphite plate can be used alternatively for AIN plate, please click the picture below to order.

· Halogen Light Heater replacement is available at extra cost

Temperature Controller

· Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters

· Each controller has PID auto-tune function to protect heaters from overshooting and alarm function to avoid overheating and thermal couple broken

· PC communication interface & software is installed for (click picture below for details) recording temperature profile shown as below

Working Temperature

· Maximum temperature for each heater: <= 650ºC

· Maximum temperature difference between two heaters: <= 300ºC depends on the spacing between two heaters:

o Spacing 30mm       Max. temp difference:  315ºC @ heating bottom only

o Spacing 40mm       Max. temp difference:  350ºC @ heating bottom only

o Spacing 50mm       Max. temp difference:  395ºC @ heating bottom only

Heating & Cooling Rate

· Heating: < 8ºC/s ( heating single heater only )

· Cooling: < 10ºC/s (600 - 100ºC) Max.

Thermal Couple

Two K-type thermal couples (exposed) are installed on top and bottom heaters separately

Working Voltage

208 - 240VAC, single phase, 20A air breaker

Power Requirement

2200W total ( 1100W for each heater )

Optional

· One vacuum pump is required. Please order separately by clicking the first picture from the left below. Vacuum level can reach < = 10E-2 torr by mechanical pump 

· If you run corrosive gas, please consider to use anti-corrosive dry pump is shown in the second picture from the left below ( Pfeiffer pump from Germany ) at extra cost

· You may order a recirculating water chiller for saving water source separately

· You may choose digital MFC gas delivery system by clicking the first picture from the right below

Warranty

One year limited with lifetime support ( Consumable parts such as quartz tube and heating lamps are not covered by the warranty)

Laptop, software & WiFi Control (Optional)

· Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.

· Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.

· A wireless remote control provides up to 300 meters operating range.

· Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.

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Note: 
The software is only compatible with MTI’s Yudian Temperature Controller
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Application notes

Please read article: High efficiency  CSS CdTe Solar Cell

Warning

· The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gasses should be limited to < 200 SCCM (or 200 mL/min) for reducing thermal shocks to the tube.

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.