Furnace Features

• Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
• Heated by shortwave IR tube lamps for fasting heating
• Two heating zones, 195 mm each, total 390 mm in length for HPCVD
• Sample holder is slidable in inside retractable bellows, which can achieve fast heating or cooling under vacuum or controlled atmosphere
• Vacuum flanges and the digital vacuum gauge are installed  for immediate use.   

Voltage

• AC 208-240V, three phase, 50/60 Hz
• 24 Kw

Heating Element

• 16 pcs 1.5 Kw Halogen light tube,  ( Dia. =10mm,  L=390mm )
• Standard working life: 2000 hrs.  ( depends on heating rate )
• The Halogen light tube is consumable.  Please click picture left to order spare.

Max. Temperature

• 1100°C (<  30 minutes )     
• 1000°C ( continuous   )

Temperature Accuracy

• +/ - 1°C

Max. Heating Rate

• 50  ºC/s

Max. Cooling Rate

• 10 °C/sec Max.  Cooling Rate from 1000~200C:

Process Tube Size

• High purity fused quartz tube
• Φ110（OD）×Φ106（ID）×740（L）, mm

Sliding Rails 

• Dual sliding rails made of Cr plated steel
• Sliding rail length: 400 mm

Thermocouple

• Two K type, 1/4" Dia x 24" length

Temperature Controller  

• Two temperature controller included to control two zone independently via SCR
• PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
• Built-in overheating & thermocouple broken protection.
• Over temperature protection and alarm allows for operation without attendant(s).
• +/- 1 ºC temperature accuracy.
• RS485 Communications Port.
• PC Control:  
• An MTS-02 control module is included for PC control on this furnace.
• The new version of PC module is now compatible with Lab View 05/08/2014
• A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. 

Vacuum Flanges

• Stainless steel quick vacuum flanges are installed on both ends of the tube for easy assembling
• 1/4"diameter feedthrough on left flange  for inserting  K-type thermal couple
• Digital vacuum gauge is included
• KF25 right angle valve is installed for connecting to a vacuum pump
• Needle valve for vacuum release is included
• One  retractable bellows is installed on left flange, which allows sample hold sliding to cold under controlled vacuum or atmosphere

Vacuum Level 

•  Limited by vacuum pump
• 10^-2 torr can be achieved by mechanical pump
• 10^-4 torr can be reached by molecular pump
• The pump is not included .

Water Cooling  (optional)

• Cooling water is required.
• Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
• We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.   
• Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise, O-ring may melt. 

Dimensions

• 1000mm×540mm×800mm

Net Weight

~180 Kg

Shipping Weight

500 lbs

Warranty

Two years limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Laptop, software & WiFi Control(Optional)

• Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
• Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
• A wireless remote control provides up to 300 meters operating range.
• Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
• Note: 
  The software is only compatible with MTI’s Yudian Temperature Controller
  

Compliance

• CE Certified
• All electric components ( >24V) are UL / MET / CSA certified

• The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
• 

Application Notes

 

• Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).
• Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.  The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
• Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
• Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
• Quartz tubes should be replaced after every 10th use to ensure the best performance. 
• Samples should never be placed on the tube directly; 
• After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.