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contact us
- If you have questions, please contact us, all questions will be answered
- WhatsApp : +86 13003860308
- Email : David@tmaxcn.com
- Email : Davidtmaxcn@gmail.com
- Add : No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)
products
RF Generator for 50, 80 or 125 mm OD Tube Furnace
Model Number:
TMAX-RFCompliance:
CE CertifiedWarranty:
Two years limited warranty with lifetime technical supportShipping Port:
XiamenPayment:
L/C D/A D/P T/T Western UnionDelivery Time:
5 days
- WhatsApp : +86 13003860308
- Email : David@tmaxcn.com
- Email : Davidtmaxcn@gmail.com
- Wechat : 18659217588
Product Details
RF power supplyRF Generator for 50, 80 or 125 mm OD Tube Furnace
The PECVD system
is composed of tube furnace, quartz vacuum chamber, vacuum system, gas supply
system and rf power supply system.Mainly used in: metal film, ceramic film,
composite film, graphene and other growth.It is easy to increase the function
of plasma cleaning etching and etching.The PECVD system has advantages of high
deposition rate, good uniformity, consistency and stability.
Power output range |
0-500W |
Maximum reflected power |
200W |
working frequency |
RF：13.56MHZ±0.005% |
Pw stability |
+/-0.1% |
harmonic component |
≤-50dbc |
Rf width |
0-600mm adjustable |
Matching mode |
AUTO |
Cooling mode |
air cold |
Noise |
<50dB |
RF interface |
50Ω N-type |
Input power |
208-240V 50/60HZ |
Cindy@tmaxcn.com
David@tmaxcn.com
+86 13003860308
18659217588