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MFS system

Programmable Mass Flowmeter Control System MFS System

  • Model Number:

    TMAX-MFS
  • Compliance:

    CE Certified
  • Warranty:

    One year limited warranty with lifetime technical support
  • Shipping Port:

    Xiamen
  • Payment:

    L/C D/A D/P T/T Western Union
  • Delivery Time:

    5 days
Product Details

Programmable Mass Flowmeter Control System MFS System

1. The gas flows out of the cylinder, through the pressure reducing valve, through the Teflon pipe to the inlet of the gas supply system, then through the proton flowmeter to control the gas flow, then through the air mixing tank, and then into the air inlet of the furnace. The gas flows out of the air outlet pipe, through the three-way valve, one end is connected with the vacuum pump, and the other end is connected with the air outlet.

2. The air mixing tank is connected with a pressure gauge, and the display panel of the pressure gauge and the proton flowmeter are installed on the same panel.

3. Each gas pipeline has a high-pressure stop valve to ensure safety.

4. The gas path adopts high-precision gas rotameter, and the internal gas path adopts Teflon tube, which has good corrosion resistance.

5. All joints are connected by ferrule, with good air tightness and high pressure resistance.

6. Equipment composition: multi-channel air intake pipeline, proton flowmeter, air mixing tank and air outlet pipeline


Features

1. Several air intake channels are customized by customers, standard interface, convenient connection

2. The liquid crystal touch screen controls and inputs the gas flow of each channel, and views the gas flow curve of each channel in real time

3. Each gas path is provided with high-pressure stop valve, which is convenient to cut off the gas path


Specifications

Gas path/channel

2/3/4/5/6/7/8/9/10 selectable

Gas type

Choose by customer

Flowmeter range

5—500SCCM;1—10SLM selectable

working voltage

220v/50Hz

Working pressure difference

0.1-0.5MPa

Maximum pressure

3MPa

Accuracy

±1.5% F.S

Linear

±0.5~1.5% F.S

Corresponding time of proton flowmeter

<1S

measuring range

0.1-0.15MPa

Mixing tank

SS304

Air inlet and outlet

φ6mm Stainless steel ferrule interface

Pipe material

6mm diameter stainless steel pipe is used for internal pipe; 6mm Teflon pipe is used for external pipe

Control system

PLC control system, LCD touch screen input, independent control of each gas path