Main Features

· 500 ~ 10000 RPM spinning speed programmable

· Accept substrate from 5 mm to 5" 

· PP chamber for anti-corrosive operation.

· One gas inlet port on top of cover which can fill inert gas during coating

· One 20ml Plastic Syringe is included

· Safety interlock is integrated into the lid

Vacuum Chuck

· Chamber size: 150 mm diameter 

Vacuum Pump

· One 120L/min Oilless Vacuum Pump is included in the standard package, please click the picture below for specification details. 

· For Ar glove box user, Please consider our 24VDC vacuum pump to be used inside a glovebox without feedthrough.

· Vaccum grade rubber pipe is included for immediate use

Programmable Contro

· Duration up to 60 seconds

· Acceleration: 100 - 2000 rpm / sec adjustable

· Accuracy:   < 5%

· Digital control panel can store 12 programs and each program has 6 segments programmable for  speeds, acceleration, and spin duration

Input Power

· AC 220V

· 1000 W total for oilless pump and spin cater

· 24VDC high speed  motor

Gas Inlet

6mm diameter gas inlet port allows customers to fill desired gas into the chamber, which can make coating under variable gas flow environment

Liquid Injection

· Standard Package:  20ml plastic syringe with needle

· Option 1:  Precision Electronic Single Channel Pipette: 20 - 200uL

· Option 2:  Heatable glass syringe with temp. controller, up to 200C

Optional

· Option 1: PE Heating cover with digital temperature controller up to 120°C(<10 minutes) is available upon request at extra cost. This is a short drying process (usually takes several seconds or Max.10 minutes) which can dry and solidify the coating and remove the residual solvent after coating process is completed.

· Option 2:PTFE Heating cover + PTFE vacuum chuck setis capable of drying temperature up to 200°C(< 5 minutes). Vacuum chuck and chamber also need to be replaced by PTFE material to withstand high heating temperature.

· Option 3: Heatable syringe with digital temperature controller up to 200C is available upon request at extra cost. It provides the pre-heat solution during the coating process.

· Option 4: Vacuum Flash Assembly for DIY Vacuum Flash-Assisted Solution Process (VASP), Up to 5 mTorr  is available 

Product Dimensions

450mm Depth ×280mm W ×340mm H

Net Weight

20 kg