Furnace

structure

Compact 4“ RTP Tube Furnace（Double layer steel case mullite liner)

Heating element

8 pcs Halogen light tube (D=10 L=300 T =200, mm)

Working Temp.

1100° C max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise O-ring may get melting )
               

Max heating rate

50°  C/sec

Max cooling rate

64° C/min (Under vacuum: 200 mtorr), 117° C/min (Under atmosphere pressure)  

Heating zone

12" length with 4" constant temperature zone within +/-1°C uniformity

Program Temp. Controller

Quartz Tube & Sample Holder

• Quartz Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length
• 3" diameter Sample holder is inserted to sliding flange, which is made of quartz
• One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia.
• AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area
• The sample holder is removable from flange

Vacuum flange

KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves.
Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement. 
               

Water Cooling Jacket

• Cooling water is required.
• Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
• We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.   

Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds.

Flow meter

One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min 

Power input

208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)

HV Station
High Vacuum Station

Structure

• Mobile cart size:  600 (L) x 600 (W) x 700(W), mm
• Max. Loading:       600 Lbs on top
• Molecular pump control Panel :   LCD digital
• Diaphragm Pump and  Turbo Molecular Pump are installed inside the steel case. 

Vacuum Degree

6.3E-5 mbar (with 4" RTP tube furnace in 40 minutes)

Control panel

• One button operation - the diaphram pump and the turbo molecular pump will start after pressing "start" button.
• System controlled spining speed - the controller will control the speed of the turbine spining up and down according to the vacuum level and leaking rate of the reaction chamber.
• Self protection - the system will protect the pump from damage by overheating and overcurrect if the leaking rate of the reaction chamber is too high to achieve high vacuum. 

• LCD screen - double lines parameters checking interface make the working easier to be handled.

                                                 

Start-up time

2 minutes

Backing Pump Volume Flow Rate at 10 mbar

3.8 L/min for 50Hz and 4.4 L/min for 60Hz 

Power input

110V AC or 220V AC switchable, 50/60Hz

Power consumption

Duration/Max power: 100/110Watt

Shipping Info

Weight and Dimension

RTP furnace: 110 lbs,  760 x 330 x 530mm (30" x 13" x 21" inch) L x W x H
HV station: 40 lbs,  600 x 600 x 700mm (24" x 24" x 28") L x W x H

Warranty

Laptop, software & WiFi Control (Optional)

Compliance

• CE Certified
• The furnace is ready to pass UL 61010, IEC 61010, SPE-1000 tested by NRTLs at extra cost. Please contact us for quote and detail information. 
• Temperature controller is MET and CE Certified
• High Vacuum Station is TUV Certified