Furnace Structure

• One sliding flange is installed on right side furnace,

which can move processing tube in & out easily.

• Vacuum flanges can reach 10E-5 torr by molecular pump or

 10E-3 torr by a mechanical pump.  The flange has a 1/4"

Dia. the thermal couple built in for monitoring real-time

temperature inside the tube.

• Digital vacuum gauge is installed the flange
• RS485 port included for computerized control

Power

2.5KW ( 20A breaker required)

Voltage

AC 208-240V Single Phase, 50/60 Hz

Max. Temperature

1500  ^oC

Continuous Temperature

1400  ^oC

Temperature Accuracy

+/ - 1 °C

Heating Zone Length

 6" (152 mm)

Constant Temperature Zone

100 mm (+/-1^oC) @ 800 - 1500 ^oC

Heating Elements

SiC rod (1500C grade) , 4 pcs

Thermocouples

Two S type thermal couples are included. One S type 5"

Length is built in furnace to control furnace temperature

And another S type 14"  inserted inside tube to monitor sample

real temperature profile (below right)

Temperature Controllers

• Two digital temperature controllers with 30 

programmable segments are built in. One control furnace temperature 

and another monitor temperature of the sample inside processing tube.

• Built-in over temperature alarm and protection allows

for operation without an attendant.

• +/- 1 ºC temperature accuracy.

Heating & Cooling Rate 

Temp vs Time curve
(Mullite tube)

Temp Vs Time curve 
(Quartz tube)

Processing Tube Size

(one mullite tube and one quartz tube are included in the standard package)

Warning:  Processing tube is consumable and easy to broken 

during RTP, not covered by warranty.  Pls click pic above to order spare

Sliding Flange

• Double sliding rail made by Cr-plated steel
• Sliding length: 350 mm

Vacuum Seal & Digital Vacuum Gauge

• One stainless steel flanges with 1/4"Dia fitting for insect

thermal couple is included

• One digital vacuum gauge and valves are included for

immediate use.

• OPTIONAL: A gas-type independent (above 10mbar)

digital vacuum gauge with a wide range between 3.8x10^-5 

to 1125 Torr. Aside from greater measurement precision,

this gauge reduces risks of chamber explosions caused

by the incorrect reading of gas pressures due to gas-type 

dependency.

Vacuum Level 

• Limited by the pump. ( pump is not included )
• 10E-5 torr can be reached by molecular pump
• 10E-2 torr by a mechanical pump.

Dimensions

400L  x 305W x 530H mm (15.7" x 12" x 21")

Net Weight

~ 45 Kg

Shipping Package Size

47"x31"x40"

Shipping Weight

150 lbs

Warranty

One year limited manufacturer's warranty with lifetime support 

(Consumable parts such as furnace liner, processing tubes,

heating elements, and O-rings are not covered by the warranty, 

please order replacements at related products below.)

Laptop, software & WiFi Control (Optional)

• Brand new laptop with Microsoft Window 10 and
• Microsoft Office 2013 (30 days free trial) for immediate use.

Labview Based Temperature Control System enables

• user to edit temperature profile, manage heat-treatment

recipe, record and plot data for MTI furnaces.

• A wireless remote control provides up to 300 meters

operating range.

• Above features are available upon request at an extra

cost (up to $1,000). Please contact us for more information.

• Note: 
  The software is only compatible with MTI’s Yudian

Temperature Controller

    

Compliance

• CE Certified
• UL / MET / CSA Certification is available upon request, 

additional charges will apply

• Temperature controller is MET and CE Certified
• Transformer is UL Certified

Warning:

• To get the fast heating performance, first keep the tube

out of the chamber meanwhile, preheat the chamber to

the required temperature. Then insert the tube into the

chamber to get fast heat. Please watch the demo video

below to see how this is done.

• The tube furnaces with processing tube are designed for
• using under vacuum and low pressure < 0.02 MPa / 0.2 Bar/

 3 PSI.Vacuum limit definition for all mullite tube

furnaces: * Vacuum pressures may only be safely used up

to 1300°C

• Attention: A two-stage pressure regulator must be

installed on the gas cylinder to limit the pressure to

below 3 PSI for safe operation.  

• Never heat the furnace while the gas release valve is

closed and a positive pressure condition exists within the

furnace chamber. The pressure gauge must be used to

closely monitor the chamber condition at all times during

the heating process; please open the gas release valve

immediately once the chamber pressure has reached over

3 PSI to prevent unforeseeable damages.

• The flow rate for gasses should be limited to < 200 SCCM 

( or 200ml/min )

• NOTE The mullite tube shall be considered as a consumable

 part. We strongly recommend user keep spare tubes in

order to ensure the continuity of operation. The tube is

not covered by Warranty. Use the link to order more. 

• Please wear protective gears, such as heat resistant

suit & gloves, if you intend to retract the tube from

the heating chamber. 

DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!

Application note

You may modify the RTP furnace into a small RTE

( rapid thermal evaporation ) or HPCV ( hybrid physical & chemical

 vapor deposition ) by DIY.

Attention Notes

Performance degradation (i.e. furnace can not reach the maximum

 temperature 1500°C or it is drawing a higher than normal

working current) can be expected due to the use of aged

SiC heating elements. It is necessary to replace all the heating

elements if the above symptoms were seen.