1200°C Vertical PECVD Furnace w/ RF Generator, Gas Mix & Pumping System

TMAX-1200-PECVD series Chemical Vapor Deposition (CVD) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) multi-zone split tube furnaces feature the famous Kanthal® (Sweden) wire heating elements embedded in high quality Mitsubishi® (Japan) alumina fiber insulation. All steel dual-layer housing ensures durability and helps minimize heat loss to exterior surface.

All our furnaces are CE compliant.

Features

·        Compact, portable and lightweight design.

·        Lower processing temperatures required compare to conventional CVDs.

·        Film stress can be controlled by high/low frequency mixing techniques.

·        Split furnace chamber for fast and easy tube access.

·        Standard package includes set of stainless steel vacuum sealing flanges with valves and pressure meter.

·        Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot.

·        Multiple atmosphere processes in a single cycle are possible (ex: binder burn out in air and parts sintering under rough vacuum or inert gas environment.)

·        Built-in amp meter and dual voltmeters for easy monitoring and troubleshooting.

·        Built-in computer interface.

·        Long life type K thermocouple.

·        Slidable furnace option gives you ultra fast cooling rates

Safety

·        Overheat protection shuts down the furnace if temperature is outside of acceptable range (refer to controller's manual) or when the thermocouple is broken or malfunctions.

·        Power failure protection resumes furnace operation right after the point of failure when power is reestablished.

Warning! NEVER fill furnace with explosive gases, including Hydrogen, Carbon Monoxide and Methane.

Furnace, vacuum pump and gas mixing system specifications

 RF generator specifications

Part description	Quantity	Part image
split tube furnace	1 set
Multi-channel gas supply system	1 set
Plasma RF power supply (optional)	1 set
Vacuum pump and enclosure (optional)	1 set
Quartz tube	1 pc
Teflon Tube(N Stand for number of tubes)	N*5
Stainless steel vacuum sealing flanges w/ pressure meter	1 set
Stainless steel hook	1 pc
Alumina ceramic thermal block	2 pairs
Thermal gloves	1 pair
High temperature Al2O3 alumina crucible	5 pcs
Spare fuse	2 pcs
USB/RS485 computer interface kit	1 set
Furnace and Shimaden controller manual	2 pcs