Furnace Structure

• Both furnaces are double layer steel structure with 1200°C max. working temperature
• Each Furnace has 200mm heating zone and 60 mm long constant temperature zone

• One pair of sliding rails are installed on bottom of furnace, which allows furnace to be 
• manually moved from side to side with max sliding distance 400 mm.

• Vacuum flanges is installed for immediate use.

Power of furnace

 2.5 KW in total

Voltage

 AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required

Max. Temperature

1200°C (<1 hour)

Continuous Temperature

1100°C

Heating & Cooling Rates 

Heating Zone Length

200mm( ~8")  for each furnace

Constant Temperature Zone

60 mm (+/-1°C @ 400-1200°C)

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Processing Tube Size

High purity fused quartz tube

Size:  50mm O.D x 44mm I.D x1400 mm Length 

Temperature Controller

• Two furnaces are PID automatic control with 30 programmable segments for precise control of 
• heating rate, cooling rate and dwell time.

• Built-in over temperature alarm and protection allows for operation without an attendant.
• Two K-type thermal couples are included. 
• Optional:  
• The furnace may be operated by PC by installing control module. Please order an MTS-02 control module at extra cost. 
• If you order the PC control module together with the furnace, we will install and 
• test it before shipping. 
• We recommend you to order a computer (laptop) 
• from us to avoid software installation problems.

Temperature Accuracy

+/ - 1°C

 Vacuum Flanges

• Stainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy duty support. 

• Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost.          
•     

 Sliding Rails / Table

• Double sliding rail made by Cr-plated steel
• Sliding length: 1200 mm
• Two slide stopping clamps are included for holding the position of the furnaces.

 Vacuum Level 

• Limited by pump ( pump is not included, click on pictures to order )
• 10E-5 torr can be achieved via molecular pump
• 10E-2 torr can be achieved via a mechanical pump.

Optional for upgrate

• Motorized sliding is available upon request.
• 1-9 chaanel gas mixing and delivery moudles is availle ( click the picture 2nd picture in below to order )

• 100W - 500W  RF plasma generator for plasma enhanced processing is available upon request.

•  This module allows you build your own Plasma Enhanced Thermal CVD system

 Dimensions

• Furnace: 340 x 300 x 400 mm
• Total:1600 x 430 x 500 mm ( furnaces + sliding )
•     

 Net Weight

~ 80 Kg

Shipping Package Size

70" x 45" x 45" (inch)

Shipping Weight

300 lbs

Warranty

Two years limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty,

 please order replacements at related products below).

Laptop, software & WiFi Control(Optional)

• Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
• Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
• A wireless remote control provides up to 300 meters operating range.
• Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.

·         Note: 
The software is only compatible with MTI’s Yudian Temperature Controller

     

Compliance

• CE Certified
• All electric components ( >24V) are UL / MET / CSA certified
• The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.                             

Application Notes

 

• Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa

• Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.  
• The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube

• Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  
  

Warning